Single-nanometer focusing of hard x-rays by Kirkpatrick-Baez mirrors.

We have constructed an extremely precise optical system for hard-x-ray nanofocusing in a synchrotron radiation beamline. Precision multilayer mirrors were fabricated, tested, and employed as Kirkpatrick-Baez mirrors with a novel phase error compensator. In the phase compensator, an at-wavelength wavefront error sensing method based on x-ray interferometry and an in situ phase compensator mirror, which adaptively deforms with nanometer precision, were developed to satisfy the Rayleigh criterion to achieve diffraction-limited focusing in a single-nanometer range. The performance of the optics was tested at BL29XUL of SPring-8 and was confirmed to realize a spot size of approximately 7 nm.

Yamauchi K ，Mimura H ，Kimura T ，Yumoto H ，Handa S ，Matsuyama S ，Arima K ，Sano Y ，Yamamura K ，Inagaki K ，Nakamori H ，Kim J ，Tamasaku K ，Nishino Y ，Yabashi M ，Ishikawa T ... -  《-》

Multilayer Kirkpatrick-Baez focusing mirrors with phase compensation for sub-20 nm focusing at the hard X-ray nanoprobe beamline of SSRF.

Jiang H ，Xie J ，He Y ，Jiang Z ，Liang D ，Yu H ，Li A ... -  《OPTICS EXPRESS》

High-energy x-ray microbeam with total-reflection mirror optics.

Suzuki Y ，Takeuchi A ，Terada Y 《REVIEW OF SCIENTIFIC INSTRUMENTS》

Nanofocusing of X-ray free-electron laser using wavefront-corrected multilayer focusing mirrors.

Matsuyama S ，Inoue T ，Yamada J ，Kim J ，Yumoto H ，Inubushi Y ，Osaka T ，Inoue I ，Koyama T ，Tono K ，Ohashi H ，Yabashi M ，Ishikawa T ，Yamauchi K ... -  《Scientific Reports》

Kirkpatrick-Baez mirrors to focus hard X-rays in two dimensions as fabricated, tested and installed at the Advanced Photon Source.

Kujala N ，Marathe S ，Shu D ，Shi B ，Qian J ，Maxey E ，Finney L ，Macrander A ，Assoufid L ... -  《-》